OG™ 100	Zygo MESA	Tropel Flatmaster® 200
Accuracy	0.1mm	0.15mm	0.15mm
Dynamic Range	Adjustable	Fixed	Fixed
Field of View	6" x 6"	4" x 4"	7" x 7"
Cycle Time	20 seconds	2 seconds	10 seconds
Principle	Absolute	Incremental	Incremental

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